Technologies

Piezoelectric Micromachined Ultrasonic Transducers (pMUTs) have attracted industry attention for their good acoustic matching, small geometry, low cost-by-batch fabrication, and compatibilities with CMOS and consumer electronics. While planar pMUTs have reasonable performance over bulk piezoelectric transducers, certain deficits remain in terms of coupling and acoustic pressure outputs, DC displacements, bandwidth, and power consumption. To address these deficiencies, researchers at the University of California, Berkeley, have developed a next generation of shaped pMUTs which are no longer fully defined by resonance frequency and can accommodate larger pressure outputs and bandwidths. This new pMUT apparatus can significantly boost overall performance while dramatically reducing power as compared to flat diaphragm state-of-the-art pMUTs.